Wafer detection

Challenge

The variety of surface conditions on a wafer makes stable wafer detection difficult. Some thin-films (like anti-reflection-coating) on a wafer absorb specific wavelengths, making wafer detection impossible with a single-wavelength optical sensor.

Solution

Omron offers a single fiber sensor with a white LED emitter and a RGB receiver. The wide range of wavelengths enables it to distinguish between surface conditions and detect all the wafers regardless of the surface condition.

Benefit

Various wafers can be detected with a single sensor. Furthermore a compact fiber sensor saves costs and space.