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Quick and accurate temperature stabilization
Challenge
Temperature changes caused by mechanical disturbance have to be recovered quickly in order to maintain high throughput.
Solution
Omron’s temperature controller with 2-PID algorithm 'Adjustment disturbance overshoot function', enables fast ramp-up and quick recovery from temperature drops while at the same time minimizing stabilization time.
Benefit
Improved through-put and high thin-film quality through stable temperature.
Related Applications
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