Wet process
In wet processes, such as single wafer cleaning, butch cleaning and post-CMP cleaning, wafers are cleaned with water or chemicals to remove light contamination, particles and dust.
Efficient medium consumption and high throughput is required in wet processes.
Omron offers reliable sensing solutions for efficient and safe medium handling. Incorrect handling causes not only long down times, but also the hazard of electrical shock or exposing operators to dangerous chemicals, so risks have to be found and eliminated quickly.
To be as flexible as possible with the various system options, Omron proposes software-module-based machine control with PLC. It enables object-oriented and recyclable software development.
Related Applications
The variety of surface conditions on wafers makes stable wafer detection difficult. Some thin-films on wafers...
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A wafer slide-out event from a predetermined position can cause a crash between robot arm and wafers. For secure...
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To centralize the wafer or search for the notch position, the edge position has to be measured accurately and...
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Leakage of a liquid can cause a serious hazard, such as giving an electric shock, or exposing operators to...
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When you detect the level of liquid in a transparent tube, bubbles, drops or mucous liquid may cause detection...
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Mechanical sensors can cause damage to the glass/wafer. On the other hand, it is difficult to detect glass/wafer...
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