Wafer detection
Challenge
The variety of surface conditions on wafers makes stable wafer detection difficult. Some thin-films on wafers absorb a specific wavelength. These wafers cannot be detected by an optical sensor with single wavelength light source.
Solution
Omron offers a single fiber sensor with white LED emitter and RGB receiver. A wide range of wavelengths enables the differences between surface conditions to be distinguished and all wafers to be detected regardless of the surface condition.
Benefit
Only processed wafers are transferred and various wafers can be detected with one compact fiber sensor, saving costs and space.
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