Wafer transfer
300mm wafers are transferred to a loadport with FOUPs.
EFEMs (Environmental Front End Module) align and transfer wafers from loadports to the wafer station at the various process equipment.
Omron offers solutions for loadport that comply with SEMI standards.
At the wafer alignment stage, the orient notch and deviation of the wafer have to be aligned to transfer wafers at the correct position. To keep yields high, wafer handling has to be done safely, quickly and accurately and the position of the wafer or robot handling arm should be checked to avoid failures.
Related Applications
Detecting FOUP cassettes on load port with an optical sensor is made difficult by the variety in color, surface...
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To detect the presence of wafers in a wafer carrier correctly, the opening angle of through beam has to be narrow...
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For 300 mm FOUP management, faulty reading of the carrier ID causes manufacturing-line stoppage. The...
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Wafer handling is critical to the operation and needs to be safe, quick and accurate.
For instance when you set...
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Wafer level management is ideal for tracking data, but decoding any ID marking on a wafer is not easy due to the...
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The variety of surface conditions on wafers makes stable wafer detection difficult. Some thin-films on wafers...
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A wafer slide-out event from a predetermined position can cause a crash between robot arm and wafers. For secure...
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