Ironless linear motor gantry stage

Challenge

The process of wafer bumping requires an installation that enables a high yield and precise positioning. Since circuits grow increasingly smaller, the tolerances shrink with them.

Solution

Omron´s linear servos can reach speeds up to 5m/s and accelerate up to 100m/s² with a positioning precision of 0.078µm.

Benefits

The characteristics of Omron servos in combination with Omron motion controllers allow you to improve your machine’s performance with regard to precision and yield.