Flatness/ position measurement for wafer gripper

Challenge

Wafer handling is critical to the operation and needs to be safe, quick and accurate.

For instance when you set up or maintain the process module and transfer module, the wafer gripper has to be horizontal and at the right position.

Solution

Omron offers compact laser measurement sensors. The separation of sensor head and amplifier enables the sensor head to be downsized with less heat emission, easy setting up and easy maintenance.

Benefit

Safe wafer handling with limited space requirement.