Temperature uniformity on wafers
Challenge
Temperature uniformity is key to realize high thin-film quality for fine patterning. For 300mm wafers it’s difficult to maintain certain heaters at the same profile, due to interference and disturbance.
Solution
Gradient Temperature Control (GTC), Omron’s interacting PID control technology, ensures that a two-dimensional temperature profile remains constant over the defined area. GTC makes it possible to control the exact shape of the temperature profile at any position.
Benefit
Enables high process quality to be achieved, while reducing setting-up time.
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