Carrier transport with rotary servo in thermal

Challenge

In thermal processes, an optimal wafer handling system is required. The handling of the wafer has to be free of vibrations and unexpected movements.

Solution

Omron’s servo drives guarantee, through their self-tuning option, vibration-free control of the servo motor and therefore a smooth movement.

Benefits

The controlled movement guarantees smooth wafer handling, resulting in fewer damaged wafers and a high throughput.