Thermal process

In thermal processes, such as oxidation diffusion and low-pressure CVD, wafers are baked in quartz furnaces to make a thin film or to dope the surface. For high thermal-process quality, accurate and fast temperature control is one of the keys. And Omron offers an ideal algorithm in both its stand-alone and programmable-loop temperature controllers.

Safe operation is also a key issue in thermal processes. The interlock system protects operator and system from excess temperatures and other unsafe conditions. When a machine experiences problems, it has to fail safe and the operator has to be warned simultaneously.

Omron offers a flexible safety control system based on software logic, which can be combined with DeviceNet to save on wiring, a PLC for machine control, and MMI for safety monitoring in the local language. Moreover, it allows you to reduce wiring work and development time for modifications required to conform to SEMI/S2.