Reticle management

Challenge

The reticle SMIF-pod (standard mechanical interface) is applied to manage recticles during the lithography process, at reticle stockers and in the transfer system.
ID’s marked on recticles are decoded in the machine and then the ID’s are written to the RFID-tag embedded in the SMIF-pod.
The ID’s marked on recticles can be 2D coded and some of them are semi-transparent, making it difficult to decode.
The RFID at the recticle-pod must comply with SEMI E111.

Solution

Omron offers both a 2D code reader for recticles and RFID for the SMIF-pod.
The code readers have special algorithms to decode even unclear codes on transparent recticles.
For SMIF-pod management, Omron’s compact read/write antenna can comply with SEMI E111 and the reliability based on long experience with RFID enables stable operation. A converter to SEMI E99.1 is also available.

Benefit

Increased reliability ensures an automatic transfer system.
Manufacturing efficiency can be maintained and traceability improved.
With the SEMI standards, OEM’s can standardize the specification of the design.