Linear motor X/Y wafer stage
Challenge
It requires precision to put the required circuits on the wafer’s surface. Since the lithography process has to be repeated to produce several layers on the wafer, repeatability and speed is required.
Solution
Omron´s linear servos can reach to speeds of up to 5m/s and accelerate up to 100m/s² with a positioning precision of 0.078µm.
Benefits
The characteristics of Omron servos in combination with Omron motion controllers improve machine performance with regard to quality, precision and yield.
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