UV ramp inspection

Challenge

To ease the separation of dies from films, exposure to a UV lamp is required.

Illumination of the wafer at the back of the film has to be kept constant.

Stable UV lamp output is required to avoid defective products, so the lamp has to be replaced as soon as the power diminishes.

Off-line measurement with a light meter needs extra maintenance time and requires production stoppage.

Solution

Omron’s UV inspection sensor can measure the illumination power on-line.

It also allows the UV lamps to be replaced at longer intervals.

Benefit

UV-power uniformity is guaranteed, as the illuminating power can be measured continuously.

On-line measurement saves maintenance time and minimises productions stops, saving costs and improving output.