

Challenge:
The variety of surface conditions makes stable wafer detection difficult.
Glass substrates can warp under their own weight, so the sensing range should be as wide as possible.
For secure handling, the edge position has to be detected at the same position, regardless of its thickness, surface condition, or the warp.
Solution:
Omron offers unique fiber sensors to detect glass substrates at the same position on robot hands. The special optical structure allows you to position the glass substrates with excellent repeatability, even if it warps.
Benefit:
Fewer problems and secure operation.
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